Invention Grant
- Patent Title: Polishing composition, production method therefor, and polishing method and production method for substrate, using polishing composition
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Application No.: US16492835Application Date: 2018-01-23
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Publication No.: US11643573B2Publication Date: 2023-05-09
- Inventor: Yukinobu Yoshizaki , Koichi Sakabe , Satoru Yarita , Kenichi Komoto
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu
- Agency: Foley & Lardner LLP
- Priority: JP 2017048626 2017.03.14
- International Application: PCT/JP2018/001952 2018.01.23
- International Announcement: WO2018/168206A 2018.09.20
- Date entered country: 2019-09-10
- Main IPC: C09G1/02
- IPC: C09G1/02

Abstract:
The present invention provides a polishing composition with which it is possible to decrease a level difference to be unintentionally generated between dissimilar materials and a level difference to be unintentionally generated between coarse and dense portions of a pattern. The present invention relates to a polishing composition which contains abrasive grains having an average primary particle size of 5 to 50 nm, a level difference modifier containing a compound with a specific structure, having an aromatic ring and a sulfo group or a salt group thereof which is directly bonded to this aromatic ring, and a dispersing medium and of which the pH is less than 7.
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