Invention Grant
- Patent Title: Porous polyurethane polishing pad and process for preparing the same
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Application No.: US16311614Application Date: 2018-09-10
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Publication No.: US11642752B2Publication Date: 2023-05-09
- Inventor: Jang Won Seo , Hyuk Hee Han , Hye Young Heo , Joonsung Ryou , Young Pil Kwon
- Applicant: SK enpulse Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK ENPULSE CO., LTD.
- Current Assignee: SK ENPULSE CO., LTD.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR 20170116069 2017.09.11 KR 20170116108 2017.09.11
- International Application: PCT/KR2018/010562 2018.09.10
- International Announcement: WO2019/050365A 2019.03.14
- Date entered country: 2018-12-19
- Main IPC: B24B37/24
- IPC: B24B37/24 ; C08J9/12 ; C08J9/32

Abstract:
Embodiments relate to a porous polyurethane polishing pad for use in a chemical mechanical planarization and a process for preparing the same. It is possible to control the size and distribution of pores in the porous polyurethane polishing pad by using thermally expanded microcapsules and an inert gas as a gas phase foaming agent, whereby the polishing performance thereof can be adjusted.
Public/Granted literature
- US20210229237A1 POROUS POLYURETHANE POLISHING PAD AND PROCESS FOR PREPARING THE SAME Public/Granted day:2021-07-29
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