Invention Grant
- Patent Title: Embedded sonos with a high-K metal gate and manufacturing methods of the same
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Application No.: US16541765Application Date: 2019-08-15
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Publication No.: US11641745B2Publication Date: 2023-05-02
- Inventor: Krishnaswamy Ramkumar
- Applicant: LONGITUDE FLASH MEMORY SOLUTIONS LTD.
- Applicant Address: IE Dublin
- Assignee: LONGITUDE FLASH MEMORY SOLUTIONS LTD.
- Current Assignee: LONGITUDE FLASH MEMORY SOLUTIONS LTD.
- Current Assignee Address: IE Dublin
- Agency: Kunzler Bean & Adamson
- Main IPC: H01L27/11573
- IPC: H01L27/11573 ; H01L21/02 ; H01L27/11568 ; H01L21/28 ; H01L27/1157 ; H01L29/423 ; H01L21/311

Abstract:
Semiconductor devices and methods of manufacturing the same are provided. The semiconductor devices may have a non-volatile memory (NVM) transistor including a charge-trapping layer and a blocking dielectric, a field-effect transistor (FET) of a first type including a first gate dielectric having a first thickness, a FET of a second type including a second gate dielectric having a second thickness, and a FET of a third type including a third gate dielectric having a third thickness. In some embodiments, the first, second, and third gate dielectric includes a high dielectric constant (high-K) dielectric layer, and the first thickness is greater than the second thickness, the second thickness is greater than the third thickness. Other embodiments are also described.
Information query
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