Invention Grant
- Patent Title: Torsional mode quartz crystal device
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Application No.: US17305898Application Date: 2021-07-16
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Publication No.: US11641187B2Publication Date: 2023-05-02
- Inventor: Yue Fang , Jian Feng Chen
- Applicant: Statek Corporation
- Applicant Address: US CA Orange
- Assignee: Statek Corporation
- Current Assignee: Statek Corporation
- Current Assignee Address: US CA Orange
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: H03H9/215
- IPC: H03H9/215 ; H01L41/04 ; H03H9/02

Abstract:
The disclosed technology generally relates to quartz crystal devices and more particularly to quartz crystal devices configured to vibrate in torsional mode. In one aspect, a quartz crystal device configured for temperature sensing comprises a fork-shaped quartz crystal comprising a pair of elongate tines laterally extending from a base region in a horizontal lengthwise direction of the fork-shaped quartz crystal. Each of the tines has formed on one or both of opposing sides thereof a vertically protruding line structure laterally elongated in the horizontal lengthwise direction. The quartz crystal device further comprises a first electrode and a second electrode formed on the one or both of the opposing sides of each of the tines and configured such that, when an electrical bias is applied between the first and second electrodes, the fork-shaped quartz crystal vibrates in a torsional mode in which each of the tines twists about a respective axis extending in the horizontal lengthwise direction.
Public/Granted literature
- US20220109424A1 TORSIONAL MODE QUARTZ CRYSTAL DEVICE Public/Granted day:2022-04-07
Information query
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