Invention Grant
- Patent Title: Semiconductor chip and semiconductor package
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Application No.: US17210695Application Date: 2021-03-24
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Publication No.: US11640950B2Publication Date: 2023-05-02
- Inventor: Byungwook Kim , Ahram Kang , Seongwon Jeong
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Volentine, Whitt & Francos, PLLC
- Priority: KR10-2020-0115328 20200909
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/538

Abstract:
A semiconductor chip includes; an intermetal dielectric (IMD) layer on a substrate, an uppermost insulation layer on the IMD layer, the uppermost insulation layer having a dielectric constant different from a dielectric constant of the IMD layer, a metal wiring in the IMD layer, the metal wiring including a via contact and a metal pattern, a metal pad in the uppermost insulation layer, the metal pad being electrically connected to the metal wiring, and a bump pad on the metal pad. An interface portion between the IMD layer and the uppermost insulation layer is disposed at a height of a portion between an upper surface and a lower surface of an uppermost metal pattern in the IMD layer.
Public/Granted literature
- US20220077095A1 SEMICONDUCTOR CHIP AND SEMICONDUCTOR PACKAGE Public/Granted day:2022-03-10
Information query
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