Invention Grant
- Patent Title: Photosensitive resin composition and method for producing cured relief pattern
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Application No.: US17480648Application Date: 2021-09-21
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Publication No.: US11640112B2Publication Date: 2023-05-02
- Inventor: Tomohiro Yorisue , Tatsuya Hirata , Takahiro Sasaki
- Applicant: ASAHI KASEI KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: ASAHI KASEI KABUSHIKI KAISHA
- Current Assignee: ASAHI KASEI KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JPJP2016-161681 20160822,JPJP2016-228240 20161124,JPJP2016-238452 20161208,JPJP2017-046022 20170310
- Main IPC: G03F7/037
- IPC: G03F7/037 ; C08G73/10 ; G03F7/038 ; G03F7/027 ; G03F7/023 ; C08G73/12 ; C08L79/08 ; G03F7/20

Abstract:
A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of a polyimide precursor (A), the polyimide precursor (A) being a polyamic acid ester or polyamic acid salt with a specific structure, and the weight-average molecular weight (Mw) of the polyimide precursor (A) being 3,000 or greater and less than 16,000, in terms of polystyrene, according to gel permeation chromatography (GPC).
Public/Granted literature
- US20220011669A1 PHOTOSENSITIVE RESIN COMPOSITION AND METHOD FOR PRODUCING CURED RELIEF PATTERN Public/Granted day:2022-01-13
Information query
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