Invention Grant
- Patent Title: Three-dimensional memory device with hydrogen-rich semiconductor channels
-
Application No.: US17020457Application Date: 2020-09-14
-
Publication No.: US11621275B2Publication Date: 2023-04-04
- Inventor: Kun Zhang , Wenxi Zhou , Zhiliang Xia , Zongliang Huo
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L27/11521
- IPC: H01L27/11521 ; H01L27/11582 ; H01L27/11524 ; H01L27/11526 ; H01L27/11556 ; H01L27/1157 ; H01L27/11573 ; H01L27/11568

Abstract:
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory stack including interleaved stack conductive layers and stack dielectric layers, a semiconductor layer, a plurality of channel structures each extending vertically through the memory stack into the semiconductor layer, and an insulating structure extending vertically through the memory stack and including a dielectric layer doped with at least one of hydrogen or an isotope of hydrogen.
Public/Granted literature
- US20220037352A1 THREE-DIMENSIONAL MEMORY DEVICE WITH HYDROGEN-RICH SEMICONDUCTOR CHANNELS Public/Granted day:2022-02-03
Information query
IPC分类: