Invention Grant
- Patent Title: Heating device
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Application No.: US16931563Application Date: 2020-07-17
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Publication No.: US11621180B2Publication Date: 2023-04-04
- Inventor: Masakazu Adachi
- Applicant: NISSIN ION EQUIPMENT CO., LTD.
- Applicant Address: JP Koka
- Assignee: NISSIN ION EQUIPMENT CO., LTD.
- Current Assignee: NISSIN ION EQUIPMENT CO., LTD.
- Current Assignee Address: JP Koka
- Agency: Sughrue Mion, PLLC
- Priority: JP2016-212481 20161031,JP2017-060206 20170324
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/683 ; H01L21/687
Abstract:
A heating device is provided. The heating device includes a conveyance member, first and second support members, and a heat reflecting plate. The first support member is provided on the conveyance member and supports a substrate during movement of the conveyance member. The second support member includes a heater and supports the substrate during processing of the substrate. The heat reflecting plate travels with the conveyance member and reflects heat from the heater toward the substrate.
Public/Granted literature
- US20200350189A1 HEATING DEVICE Public/Granted day:2020-11-05
Information query
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