Invention Grant
- Patent Title: Crystallization of two-dimensional structures comprising multiple thin films
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Application No.: US16989231Application Date: 2020-08-10
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Publication No.: US11621163B2Publication Date: 2023-04-04
- Inventor: Nobuhiko Kobayashi , Wenchang Yeh
- Applicant: The Regents of the University of California
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Carter, DeLuca & Farrell LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C30B29/16 ; H01L29/24 ; C30B19/08 ; C30B19/12 ; C30B29/42 ; C30B29/40 ; C30B13/06 ; C30B13/24
Abstract:
A multi-layer thin film composite is formed by applying a thin film formed from non-single-crystalline oxide onto a substrate; applying a protection film onto the thin film; and supplying energy to the thin film through at least one of the protection film or the substrate.
Public/Granted literature
- US20210043451A1 CRYSTALLIZATION OF TWO-DIMENSIONAL STRUCTURES COMPRISING MULTIPLE THIN FILMS Public/Granted day:2021-02-11
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