Invention Grant
- Patent Title: Method for operating a particle beam microscope
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Application No.: US16937058Application Date: 2020-07-23
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Publication No.: US11621145B2Publication Date: 2023-04-04
- Inventor: Björn Gamm
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Fish & Richardson P.C.
- Priority: DE102019120279.5 20190726
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/26 ; H01J37/20 ; H01J37/22

Abstract:
Two types of operational parameters are used in a particle beam microscope. First parameters influence the image quality, and have settings that are alterable by a user in view of obtaining a better image quality. Second parameters characterize the mode of operation, and the image quality becomes poorer when these change. A mode of operation of the particle beam microscope includes: registering of settings of the first parameters and the second parameters, which the user undertakes in a period of time; analysing a plurality of recorded settings of the first parameters and of the second parameters; determining settings of the first parameters which are advantageous in view of the image quality on the basis of the current settings of the second parameters; and setting the determined advantageous settings of the first parameters.
Public/Granted literature
- US20210027982A1 METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE Public/Granted day:2021-01-28
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