- Patent Title: Electron optical system and multi-beam image acquiring apparatus
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Application No.: US16525792Application Date: 2019-07-30
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Publication No.: US11621144B2Publication Date: 2023-04-04
- Inventor: John Hartley
- Applicant: NuFlare Technology, Inc. , NuFlare Technology America, Inc.
- Applicant Address: JP Yokohama; US CA Sunnyvale
- Assignee: NuFlare Technology, Inc.,NuFlare Technology America, Inc.
- Current Assignee: NuFlare Technology, Inc.,NuFlare Technology America, Inc.
- Current Assignee Address: JP Yokohama; US CA Sunnyvale
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01J37/22
- IPC: H01J37/22 ; G06T7/00 ; H01L21/67 ; H01J37/09 ; H01J37/141 ; H01J37/244 ; H01J37/04 ; G01N21/95 ; G01N21/956 ; H01J37/05
Abstract:
An electron optical system includes an electromagnetic lens configured to include a yoke, and refract an electron beam passing through the yoke by generating a magnetic field, and a shield coil disposed along the inner wall of the yoke, and configured to reduce a leakage magnetic field generated by the electromagnetic lens.
Public/Granted literature
- US20200043698A1 ELECTRON OPTICAL SYSTEM AND MULTI-BEAM IMAGE ACQUIRING APPARATUS Public/Granted day:2020-02-06
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