• Patent Title: Method for automatically replacing high-pressure gas barrels
  • Application No.: US16771079
    Application Date: 2018-12-19
  • Publication No.: US11619355B2
    Publication Date: 2023-04-04
  • Inventor: Won Ho Choi
  • Applicant: AMT CO., LTD.
  • Applicant Address: KR Asan-si
  • Assignee: AMT CO., LTD.
  • Current Assignee: AMT CO., LTD.
  • Current Assignee Address: KR Asan-si
  • Agency: Paratus Law Group, PLLC
  • Priority: KR10-2017-0174740 20171219,KR10-2018-0164682 20181219
  • International Application: PCT/KR2018/016222 WO 20181219
  • International Announcement: WO2019/124966 WO 20190627
  • Main IPC: F17C13/04
  • IPC: F17C13/04 F17C13/08
Method for automatically replacing high-pressure gas barrels
Abstract:
Disclosed is a method for automatically replacing high-pressure gas barrels, in which when loading a high-pressure gas barrel is loaded on the lift of a cabinet so as to supply gas to the wafer production line in the semiconductor fabrication FAB process facility, at the time point of replacement of the high-pressure gas barrel, a used high-pressure gas barrel is separated from a connector holder and then a new high-pressure gas barrel is connected to the connector holder.
Public/Granted literature
Information query
Patent Agency Ranking
0/0