Invention Grant
- Patent Title: Method for automatically replacing high-pressure gas barrels
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Application No.: US16771079Application Date: 2018-12-19
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Publication No.: US11619355B2Publication Date: 2023-04-04
- Inventor: Won Ho Choi
- Applicant: AMT CO., LTD.
- Applicant Address: KR Asan-si
- Assignee: AMT CO., LTD.
- Current Assignee: AMT CO., LTD.
- Current Assignee Address: KR Asan-si
- Agency: Paratus Law Group, PLLC
- Priority: KR10-2017-0174740 20171219,KR10-2018-0164682 20181219
- International Application: PCT/KR2018/016222 WO 20181219
- International Announcement: WO2019/124966 WO 20190627
- Main IPC: F17C13/04
- IPC: F17C13/04 ; F17C13/08

Abstract:
Disclosed is a method for automatically replacing high-pressure gas barrels, in which when loading a high-pressure gas barrel is loaded on the lift of a cabinet so as to supply gas to the wafer production line in the semiconductor fabrication FAB process facility, at the time point of replacement of the high-pressure gas barrel, a used high-pressure gas barrel is separated from a connector holder and then a new high-pressure gas barrel is connected to the connector holder.
Public/Granted literature
- US20210190269A1 METHOD FOR AUTOMATICALLY REPLACING HIGH-PRESSURE GAS BARRELS Public/Granted day:2021-06-24
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