Invention Grant
- Patent Title: Sputtering-target material, sputtering target, sputtering-target aluminum plate, and method of manufacturing the same
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Application No.: US16619721Application Date: 2018-06-21
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Publication No.: US11618942B2Publication Date: 2023-04-04
- Inventor: Hiroki Takeda , Masahiro Fujita
- Applicant: UACJ Corporation , SUMITOMO CHEMICAL COMPANY, LIMITED
- Applicant Address: JP Tokyo; JP Tokyo
- Assignee: UACJ Corporation,SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: UACJ Corporation,SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Tokyo; JP Tokyo
- Agency: J-Tek Law PLLC
- Agent Jeffrey D. Tekanic; Scott T. Wakeman
- Priority: JPJP2017-122210 20170622
- International Application: PCT/JP2018/023573 WO 20180621
- International Announcement: WO2018/235889 WO 20181227
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/34 ; C22F1/04

Abstract:
A sputtering-target material (2) is composed of aluminum having a purity of 99.999 mass % or higher and unavoidable impurities. When an average crystal-grain diameter at the plate surface (21) is given as Ds [μm], an average crystal-grain diameter at a depth of ¼th of the plate thickness (22) is given as Dq [μm], and an average crystal-grain diameter at a depth of ½ of the plate thickness (23) is given as Dc [μm], the formulas below are satisfied, and the average crystal-grain diameter changes continuously in a plate-thickness direction. Ds≤230 Dq≤280 Dc≤300 1.2≤Dq/Ds 1.3≤Dc/Ds
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