High density spin orbit torque magnetic random access memory
Abstract:
A spin orbit torque memory device having a vertical transistor structure. The spin orbit torque memory device includes a magnetic memory element such as a magnetic tunnel junction formed on a spin orbit torque layer. The vertical transistor structure selectively provides an electrical current to the spin orbit torque layer to switch a memory state of the magnetic memory element. The vertical transistor structure accommodates the relatively high electrical current needed to provide spin orbit torque switching while also consuming a small amount of wafer real estate. The vertical transistor structure can include a semiconductor pillar structure surrounded by a gate dielectric layer and a gate structure such that the gate dielectric layer separates the gate structure from the semiconductor pillar.
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