Invention Grant
- Patent Title: Oscillator wafer-level-package structure
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Application No.: US17330855Application Date: 2021-05-26
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Publication No.: US11545935B2Publication Date: 2023-01-03
- Inventor: Chih-Hsun Chu , Chih-Hung Chiu , Wun-Kai Wang , Hsiang-Jen Cheng
- Applicant: TXC CORPORATION
- Applicant Address: TW Taipei
- Assignee: TXC CORPORATION
- Current Assignee: TXC CORPORATION
- Current Assignee Address: TW Taipei
- Agency: Rosenberg, Klein & Lee
- Priority: TW109117803 20200528
- Main IPC: H03B5/32
- IPC: H03B5/32 ; H01L41/053 ; H01L41/047

Abstract:
An oscillator wafer-level-package structure is provided, comprising a bottom layer, an oscillator crystal and a capping layer. The bottom layer includes an upper plane, the capping layer includes a lower plane, and the oscillator crystal is disposed between the bottom layer and the capping layer and includes at least one cavity. An upper seal ring and a lower seal ring are respectively surrounding the oscillator crystal such that the oscillator crystal is sealed in between the capping layer and the bottom layer by employing the upper and lower seal rings. In addition, a diffusion barrier is further disposed in the upper seal ring and in the lower seal ring for avoiding interface diffusion. Moreover, the present invention adopts the same material for fabricating the capping layer, the oscillator crystal and the bottom layer to achieve an optimal thermal stress result when realizing the packaging structure.
Public/Granted literature
- US20210376792A1 OSCILLATOR WAFER-LEVEL-PACKAGE STRUCTURE Public/Granted day:2021-12-02
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