Invention Grant
- Patent Title: Light receiving device, manufacturing method of light receiving device, and distance measuring apparatus
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Application No.: US16806497Application Date: 2020-03-02
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Publication No.: US11545511B2Publication Date: 2023-01-03
- Inventor: Koichi Kokubun
- Applicant: KABUSHIKI KAISHA TOSHIBA , TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Applicant Address: JP Tokyo; JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA,TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Current Assignee: KABUSHIKI KAISHA TOSHIBA,TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Current Assignee Address: JP Tokyo; JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: JPJP2019-144670 20190806
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/146 ; H01L27/144 ; H01L31/0216 ; H01L31/107

Abstract:
A light receiving device comprises a substrate of a first type on a first electrode, a first region of the first type on the substrate, second regions of the first type arrayed on the first region, and third regions of a second type on the second regions. A first isolation portion is between the adjacent second regions and adjacent third regions. A second isolation portion comprising a metal is embedded the first isolation portions. A fourth region of the second type is on the first region and spaced from the second regions in a second direction with a pair of fifth regions thereon. An insulating film is on the fourth region and the pair of fifth regions. A second electrode is on the insulating film between the pair of fifth regions. The second electrode is comprised of the same metal as the second isolation portion.
Public/Granted literature
- US20210043669A1 LIGHT RECEIVING DEVICE, MANUFACTURING METHOD OF LIGHT RECEIVING DEVICE, AND DISTANCE MEASURING APPARATUS Public/Granted day:2021-02-11
Information query
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