Invention Grant
- Patent Title: Read-only memory with vertical transistors
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Application No.: US17064285Application Date: 2020-10-06
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Publication No.: US11545499B2Publication Date: 2023-01-03
- Inventor: Tenko Yamashita
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Robert J. Shatto
- Main IPC: H01L27/112
- IPC: H01L27/112 ; G11C17/12 ; H01L29/66
Abstract:
Provided is a read-only memory (ROM) device. The ROM device comprises a substrate that has a plurality of vertical transport field effect transistors (VFETs). The ROM device further comprises an un-activated semiconductor layer provided on each VFET. The un-activated semiconductor layer includes implanted dopants that have not been substantially activated.
Public/Granted literature
- US20220108996A1 READ-ONLY MEMORY WITH VERTICAL TRANSISTORS Public/Granted day:2022-04-07
Information query
IPC分类:
