Invention Grant
- Patent Title: Method for forming hybrid-bonding structure
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Application No.: US17030927Application Date: 2020-09-24
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Publication No.: US11545443B2Publication Date: 2023-01-03
- Inventor: Kuo-Ming Wu , Kuan-Liang Liu , Pao-Tung Chen
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L23/58
- IPC: H01L23/58 ; H01L23/00 ; H01L25/065

Abstract:
A method for forming a hybrid-bonding structure is provided. The method includes forming a first dielectric layer over a first semiconductor substrate. The first semiconductor substrate includes a conductive structure. The method also includes partially removing the first dielectric layer to form a first dielectric dummy pattern, a second dielectric dummy pattern and a third dielectric dummy pattern and an opening through the first dielectric layer. The first dielectric dummy pattern, the second dielectric dummy pattern and the third dielectric dummy pattern are surrounded by the opening. In addition, the method includes forming a first conductive line in the opening. The first conductive line is in contact with the conductive structure.
Public/Granted literature
- US20210005558A1 METHOD FOR FORMING HYBRID-BONDING STRUCTURE Public/Granted day:2021-01-07
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