Invention Grant
- Patent Title: Workpiece unit
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Application No.: US16740683Application Date: 2020-01-13
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Publication No.: US11545386B2Publication Date: 2023-01-03
- Inventor: Yoshinobu Saito , Masayuki Matsubara
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JPJP2019-004440 20190115
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/683 ; H01L21/67 ; G01J1/50 ; G01K11/12 ; H01J37/32

Abstract:
A workpiece unit that includes a workpiece, a tape stuck to the workpiece; and an annular frame to which an outer circumferential edge of the tape is stuck and which has an opening defined centrally therein. The workpiece is disposed in the opening in the annular frame and supported on the annular frame by the tape, and at least one of the tape and the annular frame has an irreversible discoloring section that discolors in response to an external stimulus. Such a configuration makes it possible to determine whether or not a process involving an external stimulus has been carried out on the workpiece unit, based on the appearance of the workpiece unit (i.e., based on whether the irreversible discoloring section has been discolored or not).
Public/Granted literature
- US20200227303A1 WORKPIECE UNIT Public/Granted day:2020-07-16
Information query
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