Invention Grant
- Patent Title: Platen shield cleaning system
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Application No.: US16909947Application Date: 2020-06-23
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Publication No.: US11545371B2Publication Date: 2023-01-03
- Inventor: Shantanu Rajiv Gadgil , Sumit Subhash Patankar , Nathan Arron Davis , Allen L. D'Ambra
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B24B37/27 ; B08B3/00 ; B08B1/04 ; B24B37/34 ; B24B37/12 ; B24B57/00 ; H01L21/306 ; B24B55/04 ; H01L21/304
Abstract:
In a chemical mechanical polishing system, a platen shield cleaning assembly is installed on a rotatable platen in a gap between the rotatable platen and a platen shield. The assembly includes a sponge holder attached to the platen and a sponge. The sponge is held by the sponge holder such that an outer surface of the sponge is pressed against an inner surface of the platen shield.
Public/Granted literature
- US20210394540A1 Platen Shield Cleaning System Public/Granted day:2021-12-23
Information query
IPC分类:
