Invention Grant
- Patent Title: Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method
-
Application No.: US16654155Application Date: 2019-10-16
-
Publication No.: US11545339B2Publication Date: 2023-01-03
- Inventor: Hiroshi Matsumoto
- Applicant: NuFlare Technology, Inc.
- Applicant Address: JP Yokohama
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Yokohama
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2018-204059 20181030
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01L21/027 ; H01J37/302 ; H01J37/141 ; H01J37/24 ; G03F7/20

Abstract:
A multi-charged particle beam writing apparatus according to one aspect of the present invention includes a region setting unit configured to set, as an irradiation region for a beam array to be used, the region of the central portion of an irradiation region for all of multiple beams of charged particle beams implemented to be emittable by a multiple beam irradiation mechanism, and a writing mechanism, including the multiple beam irradiation mechanism, configured to write a pattern on a target object with the beam array in the region of the central portion having been set in the multiple beams implemented.
Public/Granted literature
- US11508553B2 Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method Public/Granted day:2022-11-22
Information query