Invention Grant
- Patent Title: Scanning transmission electron microscope and adjustment method of optical system
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Application No.: US17236074Application Date: 2021-04-21
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Publication No.: US11545337B2Publication Date: 2023-01-03
- Inventor: Ryusuke Sagawa
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JPJP2020-076579 20200423,JPJP2021-020734 20210212
- Main IPC: H01J37/256
- IPC: H01J37/256 ; H01J37/26 ; H01J37/28 ; H01J37/10 ; H01J37/147 ; H01J37/22

Abstract:
A scanning transmission electron microscope that scans a specimen with an electron probe to acquire an image. The scanning transmission electron microscope includes: an optical system which includes a condenser lens and an objective lens; an imaging device which is arranged on a back focal plane or a plane conjugate to the back focal plane of the objective lens and which is capable of photographing a Ronchigram; and a control unit which performs adjustment of the optical system. The control unit is configured or programed to: acquire an image of a change in a Ronchigram that is attributable to a change in a relative positional relationship between the specimen and the electron probe; and determine a center of the Ronchigram based on the image of the change in the Ronchigram.
Public/Granted literature
- US20210335570A1 Scanning Transmission Electron Microscope and Adjustment Method of Optical System Public/Granted day:2021-10-28
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