Invention Grant
- Patent Title: Hybrid interferometric and scatterometric sensing using in-plane sensors
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Application No.: US17219779Application Date: 2021-03-31
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Publication No.: US11543235B2Publication Date: 2023-01-03
- Inventor: Tong Chen , Fei Tan , Mingzhou Jin
- Applicant: Apple Inc.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: Brownstein Hyatt Farber Schreck, LLP
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01N21/47

Abstract:
An optical sensor system including a semiconductor substrate; a self-mixing interferometry (SMI) sensor formed on the semiconductor substrate and including a semiconductor laser having a resonant cavity; and an array of photodetectors formed on the semiconductor substrate. The SMI sensor is configured to generate an SMI signal responsive to a retro-reflection of electromagnetic radiation emitted by the semiconductor laser and received into the resonant cavity. The array of photodetectors is configured to generate a set of angular-resolved scatter signals responsive to a scatter of the electromagnetic radiation emitted by the semiconductor laser.
Public/Granted literature
- US20220316856A1 Hybrid Interferometric and Scatterometric Sensing Using In-Plane Sensors Public/Granted day:2022-10-06
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