Invention Grant
- Patent Title: Method of plating, apparatus for plating, and non-volatile storage medium that stores program
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Application No.: US17605191Application Date: 2020-05-25
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Publication No.: US11542629B2Publication Date: 2023-01-03
- Inventor: Mizuki Nagai , Naoto Takahashi
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JPJP2019-111339 20190614
- International Application: PCT/JP2020/020492 WO 20200525
- International Announcement: WO2020/250650 WO 20201217
- Main IPC: C25D21/12
- IPC: C25D21/12 ; C25D7/12 ; C25D5/02 ; C25D17/00 ; C25D21/10

Abstract:
There is provided a method of plating, comprising: a process of providing a substrate that includes a first face and a second face having different patterns; a plating process of respectively supplying electric current of a first plating current density and electric current of a second plating current density to the first face and to the second face of the substrate, so as to form a plating film on the first face and a plating film on the second face; and a process of, after plating is completed first either on the first face or on the second face, supplying protection current to the face where plating is completed first, wherein the protection current has a smaller current density than the first plating current density or the second plating current density of the electric current supplied to the face where plating is completed first during plating.
Public/Granted literature
- US20220186398A1 METHOD OF PLATING, APPARATUS FOR PLATING, AND NON-VOLATILE STORAGE MEDIUM THAT STORES PROGRAM Public/Granted day:2022-06-16
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