Invention Grant
- Patent Title: Spurious-mode-free, laterally-vibrating microelectromechanical system resonators
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Application No.: US16678449Application Date: 2019-11-08
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Publication No.: US11496110B2Publication Date: 2022-11-08
- Inventor: Songbin Gong , Yong-Ha Song
- Applicant: Board of Trustees of the University of Illinois
- Applicant Address: US IL Urbana
- Assignee: Board of Trustees of the University of Illinois
- Current Assignee: Board of Trustees of the University of Illinois
- Current Assignee Address: US IL Urbana
- Agency: Lowenstein Sandler LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/17 ; H03H3/02 ; H03H9/56

Abstract:
A micro-resonator includes a first electrode positioned on a piezoelectric plate at a first end of the piezoelectric plate, the first electrode including a first set of fingers and a second electrode positioned on the piezoelectric plate at a second end of the piezoelectric plate. The second electrode including a second set of fingers interdigitated with the first set of fingers with an overlapping distance without touching the first set of fingers, the overlapping distance being less than seven-tenths the length of one of the first set of fingers or the second set of fingers. At least one of the first end or the second end of the piezoelectric plate may define a curved shape.
Public/Granted literature
- US20200212873A1 SPURIOUS-MODE-FREE, LATERALLY-VIBRATING MICROELECTROMECHANICAL SYSTEM RESONATORS Public/Granted day:2020-07-02
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