- Patent Title: Methods and systems for wafer scale transducer array fabrication
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Application No.: US16701048Application Date: 2019-12-02
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Publication No.: US11495730B2Publication Date: 2022-11-08
- Inventor: Edouard Dacruz , Flavien Daloz , Jason Barrett
- Applicant: GE Precision Healthcare LLC
- Applicant Address: US WI Milwaukee
- Assignee: GE Precision Healthcare LLC
- Current Assignee: GE Precision Healthcare LLC
- Current Assignee Address: US WI Milwaukee
- Agency: McCoy Russell LLP
- Main IPC: H01L41/083
- IPC: H01L41/083 ; H01L41/338 ; A61B8/00 ; H01L27/20

Abstract:
Various methods and systems are provided for a multi-frequency transducer array. In one example, the transducer array may be fabricated via a wafer scale approach, where a first comb structure, with a first type of element, is formed by dicing a first acoustic stack and a second comb structure, with a second type of element, is formed by dicing a second acoustic stack. Combining the first and second comb structures may form a multi-frequency transducer array.
Public/Granted literature
- US20210167273A1 METHODS AND SYSTEMS FOR WAFER SCALE TRANSDUCER ARRAY FABRICATION Public/Granted day:2021-06-03
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