Invention Grant
- Patent Title: AlGaN unipolar carrier solar-blind ultraviolet detector and manufacturing method thereof
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Application No.: US17324118Application Date: 2021-05-19
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Publication No.: US11495707B2Publication Date: 2022-11-08
- Inventor: Dabing Li , Ke Jiang , Xiaojuan Sun , Yang Chen , Yuping Jia , Hang Zang
- Applicant: CHANGCHUN INSTITUTE OF OPTICS, FINE MECHANICS AND PHYSICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Changchun
- Assignee: CHANGCHUN INSTITUTE OF OPTICS, FINE MECHANICS AND PHYSICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: CHANGCHUN INSTITUTE OF OPTICS, FINE MECHANICS AND PHYSICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Changchun
- Priority: CN202010305301.0 20200417
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/18 ; H01L31/0224 ; H01L31/0304 ; H01L31/11
Abstract:
Provided is an AlGaN unipolar carrier solar-blind ultraviolet detector that is based on the AlGaN polarization effect and that uses the double heterojunction of the p-AlzGa1-zN/i-AlyGa1-yN/n-AlxGa1-xN (0.45=
Public/Granted literature
- US20210328092A1 AlGaN UNIPOLAR CARRIER SOLAR-BLIND ULTRAVIOLET DETECTOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-10-21
Information query
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