Invention Grant
- Patent Title: Multiple deep trench isolation (MDTI) structure for CMOS image sensor
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Application No.: US16924579Application Date: 2020-07-09
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Publication No.: US11495630B2Publication Date: 2022-11-08
- Inventor: Wei Chuang Wu , Ching-Chun Wang , Dun-Nian Yaung , Feng-Chi Hung , Jen-Cheng Liu , Yen-Ting Chiang , Chun-Yuan Chen , Shen-Hui Hong
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/374 ; H04N5/369

Abstract:
The present disclosure relates to a CMOS image sensor having a multiple deep trench isolation (MDTI) structure, and an associated method of formation. In some embodiments, the image sensor comprises a plurality of pixel regions disposed within a substrate and respectively comprising a photodiode configured to receive radiation that enters the substrate from a back-side. A boundary deep trench isolation (BDTI) structure is disposed at boundary regions of the pixel regions surrounding the photodiode. The BDTI structure extends from the back-side of the substrate to a first depth within the substrate. A multiple deep trench isolation (MDTI) structure is disposed at inner regions of the pixel regions overlying the photodiode. The MDTI structure extends from the back-side of the substrate to a second depth within the substrate smaller than the first depth. The MDTI structure is a continuous integral unit having a ring shape.
Public/Granted literature
- US20200343281A1 MULTIPLE DEEP TRENCH ISOLATION (MDTI) STRUCTURE FOR CMOS IMAGE SENSOR Public/Granted day:2020-10-29
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