Invention Grant
- Patent Title: Capacitive coupling in a direct-bonded interface for microelectronic devices
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Application No.: US17074401Application Date: 2020-10-19
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Publication No.: US11495579B2Publication Date: 2022-11-08
- Inventor: Belgacem Haba , Arkalgud R. Sitaram
- Applicant: Invensas LLC
- Applicant Address: US CA San Jose
- Assignee: Invensas LLC
- Current Assignee: Invensas LLC
- Current Assignee Address: US CA San Jose
- Agency: Haley Guiliano LLP
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L25/00 ; H01L23/00 ; H01L21/311 ; H01L21/02 ; H01L23/64

Abstract:
Capacitive couplings in a direct-bonded interface for microelectronic devices are provided. In an implementation, a microelectronic device includes a first die and a second die direct-bonded together at a bonding interface, a conductive interconnect between the first die and the second die formed at the bonding interface by a metal-to-metal direct bond, and a capacitive interconnect between the first die and the second die formed at the bonding interface. A direct bonding process creates a direct bond between dielectric surfaces of two dies, a direct bond between respective conductive interconnects of the two dies, and a capacitive coupling between the two dies at the bonding interface. In an implementation, a capacitive coupling of each signal line at the bonding interface comprises a dielectric material forming a capacitor at the bonding interface for each signal line. The capacitive couplings result from the same direct bonding process that creates the conductive interconnects direct-bonded together at the same bonding interface.
Public/Granted literature
- US20210035954A1 CAPACITIVE COUPLING IN A DIRECT-BONDED INTERFACE FOR MICROELECTRONIC DEVICES Public/Granted day:2021-02-04
Information query
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