Invention Grant
- Patent Title: Microelectronic devices including stadium structures, and related methods, memory devices, and electronic systems
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Application No.: US16864823Application Date: 2020-05-01
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Publication No.: US11495530B2Publication Date: 2022-11-08
- Inventor: Darwin A. Clampitt , Roger W. Lindsay , Jeffrey D. Runia , Matthew Holland , Chamunda N. Chamunda
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L27/11582 ; H01L23/528 ; H01L27/11519 ; G11C8/14 ; H01L27/1157 ; H01L27/11524 ; H01L27/11556 ; G11C7/18 ; H01L27/11565

Abstract:
A microelectronic device comprises a stack structure, a stadium structure within the stack structure, and conductive contact structures. The stack structure comprises a vertically alternating sequence of conductive structures and insulative structures arranged in tiers. Each of the tiers comprises one of the conductive structures and one of the insulative structures. The stadium structure comprises a forward staircase structure having steps comprising edges of the tiers, and a reverse staircase structure opposing the forward staircase structure and having additional steps comprising additional edges of the tiers. The conductive contact structures vertically extend to upper vertical boundaries of at least some of the conductive structures of the stack structure at the steps of the forward staircase structure and the additional steps of the reverse staircase structure, and are each integral and continuous with one of the conductive structures. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
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