Invention Grant
- Patent Title: Substrate treating apparatus
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Application No.: US16260311Application Date: 2019-01-29
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Publication No.: US11495476B2Publication Date: 2022-11-08
- Inventor: Tatsuhisa Tsuji , Koji Nishi , Yukihiko Inagaki , Ryuichi Yoshida
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Ostrolenk Faber LLP
- Priority: JPJP2018-039542 20180306
- Main IPC: H05B3/68
- IPC: H05B3/68 ; H01L21/67 ; H01L21/687 ; H01L21/677

Abstract:
Disclosed is a substrate treating apparatus that performs a heat treatment to a substrate. The apparatus includes the following elements: a heat treating plate; a casing that produces a heat treatment atmosphere by the heat treating plate; a movable top board that is movable between a ceiling surface of the casing and the heat treating plate; and a controller that causes the movable top board to be moved to a raised position when the substrate is loaded/unloaded, and causes the movable top board to be moved to a lowered position when the substrate is placed on the heat treating plate for performing the heat treatment, thereby controlling the lowered position for every substrate.
Public/Granted literature
- US20190279886A1 SUBSTRATE TREATING APPARATUS Public/Granted day:2019-09-12
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