Invention Grant
- Patent Title: Resistive random-access memory (RRAM) device and forming method thereof
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Application No.: US17211875Application Date: 2021-03-25
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Publication No.: US11489114B2Publication Date: 2022-11-01
- Inventor: Shu-Hung Yu , Chun-Hung Cheng , Chuan-Fu Wang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN202110212202.2 20210225
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A resistive random-access memory (RRAM) device includes a bottom electrode, a high work function layer, a resistive material layer, a top electrode and high work function spacers. The bottom electrode, the high work function layer, the resistive material layer and the top electrode are sequentially stacked on a substrate, wherein the resistive material layer includes a bottom part and a top part. The high work function spacers cover sidewalls of the bottom part, thereby constituting a RRAM cell. The present invention also provides a method of forming a RRAM device.
Public/Granted literature
- US20220271222A1 RESISTIVE RANDOM-ACCESS MEMORY (RRAM) DEVICE AND FORMING METHOD THEREOF Public/Granted day:2022-08-25
Information query
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