Invention Grant
- Patent Title: Semiconductor devices, FinFET devices and methods of forming the same
-
Application No.: US16741767Application Date: 2020-01-14
-
Publication No.: US11489059B2Publication Date: 2022-11-01
- Inventor: Hsin-Yi Lee , Cheng-Lung Hung , Weng Chang , Chi-On Chui
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L21/28 ; H01L29/78 ; H01L29/06 ; H01L29/66 ; H01L21/8238 ; H01L27/092 ; H01L21/285 ; H01L29/51

Abstract:
Semiconductor devices, FinFET devices and methods of forming the same are disclosed. One of the semiconductor devices includes a substrate and a gate strip disposed over the substrate. The gate strip includes a high-k layer disposed over the substrate, an N-type work function metal layer disposed over the high-k layer, and a barrier layer disposed over the N-type work function metal layer. The barrier layer includes at least one first film containing TiAlN, TaAlN or AlN.
Public/Granted literature
- US20210217870A1 SEMICONDUCTOR DEVICES, FINFET DEVICES AND METHODS OF FORMING THE SAME Public/Granted day:2021-07-15
Information query
IPC分类: