- Patent Title: Three-dimensional memory devices and methods for forming the same
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Application No.: US17147396Application Date: 2021-01-12
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Publication No.: US11488977B2Publication Date: 2022-11-01
- Inventor: Linchun Wu , Kun Zhang , Wenxi Zhou , Zhiliang Xia
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Priority: CNPCT/CN2020/084600 20200414,CNPCT/CN2020/084603 20200414,CNPCT/CN2020/087295 20200427,CNPCT/CN2020/087296 20200427,CNPCT/CN2020/092512 20200527,CNPCT/CN2020/092513 20200527
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L21/768 ; H01L21/285

Abstract:
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A first polysilicon layer, a dielectric sacrificial layer, a second polysilicon layer, and a dielectric stack are sequentially formed above a substrate. A channel structure extending vertically through the dielectric stack, the second polysilicon layer, and the dielectric sacrificial, and into the first polysilicon layer is formed. An opening extending vertically through the dielectric stack and the second polysilicon layer, and extending vertically into or through the dielectric sacrificial layer to expose part of the dielectric sacrificial layer, and a polysilicon spacer along part of a sidewall of the opening are formed. The dielectric sacrificial layer is replaced, through the opening, with a third polysilicon layer between the first and second polysilicon layers.
Public/Granted literature
- US20210320124A1 THREE-DIMENSIONAL MEMORY DEVICES AND METHODS FOR FORMING THE SAME Public/Granted day:2021-10-14
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