Invention Grant
- Patent Title: Semiconductor memory device and manufacturing method thereof
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Application No.: US17121940Application Date: 2020-12-15
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Publication No.: US11488976B2Publication Date: 2022-11-01
- Inventor: Sung Lae Oh , Dong Hyuk Kim , Tae Sung Park , Soo Nam Jung
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Priority: KR10-2019-0085409 20190715
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/528 ; H01L23/522 ; H01L27/11526 ; H01L21/768 ; H01L21/311 ; H01L25/00 ; H01L25/18 ; H01L23/00 ; H01L27/11573 ; H01L27/11556

Abstract:
A method for manufacturing a semiconductor memory device may include: forming a pre-stack by alternately stacking a plurality of first dielectric layers and a plurality of second dielectric layers over a substrate which has a cell area and a connection area; forming a plurality of slits which pass through the pre-stack, such that a distance between the slits in the connection area is larger than a distance between the slits in the cell area; removing the second dielectric layers in the cell area and in a periphery of the connection area adjacent to the slits while leaving the second dielectric layer in a center of the connection area by injecting an etching solution for removing the second dielectric layers, through the slits; and forming electrode layers in spaces from which the second dielectric layers are removed.
Public/Granted literature
- US20210143173A1 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-05-13
Information query
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