Invention Grant
- Patent Title: Semiconductor structure and method for manufacturing the same
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Application No.: US17241370Application Date: 2021-04-27
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Publication No.: US11488957B1Publication Date: 2022-11-01
- Inventor: Li-Han Lin , Jen-I Lai , Chun-Heng Wu
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
The present disclosure provides a semiconductor structure having a memory structure and a method for manufacturing the semiconductor structure. The semiconductor structure includes a first layer, a second layer over the first layer, a third layer over the second layer, and a trench capacitor. The trench capacitor is disposed in a trench penetrating the first layer, the second layer, and the third layer. The trench capacitor includes a bottom metal layer, a middle insulating layer, and a top metal layer. The bottom metal layer covers a side wall of the first layer, a side wall of the second layer, and a first portion of a side wall of the third layer. The middle insulating layer covers the bottom metal layer and a second portion of the side wall of the third layer. The top metal layer covers the middle insulating layer.
Public/Granted literature
- US20220344340A1 SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2022-10-27
Information query
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