Invention Grant
- Patent Title: Scalable heat sink and magnetic shielding for high density MRAM arrays
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Application No.: US16874002Application Date: 2020-05-14
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Publication No.: US11444238B2Publication Date: 2022-09-13
- Inventor: Julien Frougier , Ruilong Xie , Heng Wu , Chen Zhang , Bruce B. Doris
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Otterstedt & Kammer PLLC
- Agent Daniel Morris
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L27/22 ; H01F41/34 ; H01L43/12 ; H01F10/32 ; G11C11/16

Abstract:
A magnetic random access memory (MRAM) array includes a plurality of MRAM cells, each of the MRAM cells including a magnetic tunnel junction (MTJ) stack disposed on a bottom metal via connecting the MTJ stack to a bottom conductive contact in a substrate, a plurality of top conductive contacts, each of the top conductive contacts disposed on a respective one of the MTJ stacks, and a plurality of unitary structures configured as a heat sink/magnetic shield disposed on a vertical portions of each of the MRAM cells, including vertical portions of the bottom metal vias, and under a portion of each of the MTJ stacks.
Public/Granted literature
- US20210359197A1 SCALABLE HEAT SINK AND MAGNETIC SHIELDING FOR HIGH DENSITY MRAM ARRAYS Public/Granted day:2021-11-18
Information query
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