Invention Grant
- Patent Title: Vibrator device, electronic apparatus, and vehicle
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Application No.: US16811796Application Date: 2020-03-06
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Publication No.: US11444235B2Publication Date: 2022-09-13
- Inventor: Seiichiro Ogura , Ryuta Nishizawa , Keiichi Yamaguchi
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: JPJP2019-042321 20190308
- Main IPC: H01L41/053
- IPC: H01L41/053 ; G01P3/02 ; H01L23/552 ; H01L41/047 ; H01L41/113

Abstract:
The vibrator device includes: a base; a circuit element disposed on the base; a vibrating element disposed to at least partially overlap the circuit element in a plan view; and a support substrate that is disposed between the circuit element and the vibrating element and supports the vibrating element. In addition, the vibrating element has a frequency adjustment portion that performs frequency adjustment by removing at least a part of the vibrating element, and the support substrate includes a base portion that supports the vibrating element, a support portion that supports the base portion, a beam portion that couples the base portion the support portion, and a shielding portion that is connected to the beam portion, overlaps the frequency adjustment portion in a plan view, and has light shielding properties.
Public/Granted literature
- US20200284815A1 VIBRATOR DEVICE, ELECTRONIC APPARATUS, AND VEHICLE Public/Granted day:2020-09-10
Information query
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