Invention Grant
- Patent Title: Asymmetric threshold voltages in semiconductor devices
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Application No.: US17132393Application Date: 2020-12-23
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Publication No.: US11444165B2Publication Date: 2022-09-13
- Inventor: Takashi Ando , Alexander Reznicek , Jingyun Zhang , Choonghyun Lee , Pouya Hashemi
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Robert Sullivan
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L29/78 ; H01L29/49 ; H01L29/51 ; H01L29/66 ; H01L21/02 ; H01L21/311

Abstract:
Semiconductor devices and methods of forming the same include forming an inner spacer on a semiconductor fin. Two outer spacers are formed around the inner spacer, with one outer spacer being separated from the inner spacer by a gap. A dipole-forming layer is formed on the semiconductor fin in the gap. A gate stack is formed on the semiconductor fin, between the outer spacers.
Public/Granted literature
- US20210111255A1 ASYMMETRIC THRESHOLD VOLTAGES IN SEMICONDUCTOR DEVICES Public/Granted day:2021-04-15
Information query
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