Invention Grant
- Patent Title: Recoiled metal thin film for 3D inductor with tunable core
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Application No.: US16222253Application Date: 2018-12-17
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Publication No.: US11444148B2Publication Date: 2022-09-13
- Inventor: Gwang-Soo Kim , Aaron D. Lilak , Kumhyo Byon , Doug Ingerly
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01F29/14 ; H01L21/768 ; H01F27/29 ; H01F27/28 ; H01F41/04 ; H01L27/06
Abstract:
An inductor is disclosed. The inductor includes a vertically coiled conductor, a metal contact coupled to a first end of the vertically coiled conductor, and a dielectric material coupled to the metal contact. A tunable high permittivity component is coupled to a second end of the vertically coiled conductor.
Information query
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