- Patent Title: Semiconductor memory device and method of manufacturing the same
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Application No.: US16898276Application Date: 2020-06-10
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Publication No.: US11444092B2Publication Date: 2022-09-13
- Inventor: Sang Bum Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon
- Priority: KR10-2019-0126177 20191011
- Main IPC: H01L27/11551
- IPC: H01L27/11551 ; H01L27/11519 ; H01L27/11578 ; H01L27/11565

Abstract:
The present technology includes a semiconductor memory device and a method of manufacturing the same. The semiconductor memory device includes a first semiconductor layer, a cell stack and a peripheral stack each disposed on the first semiconductor layer, a first slit structure extending in a first direction and penetrating the cell stack and the peripheral stack, a penetration structure penetrating the peripheral stack and being spaced apart from the first slit structure, and a support structure penetrating the peripheral stack. The support structure includes first sidewall portions spaced apart from each other and a second sidewall portion connecting the first sidewall portions to each other, and the penetration structure is disposed between the first sidewall portions.
Public/Granted literature
- US20210111181A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2021-04-15
Information query
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