Invention Grant
- Patent Title: Semiconductor device and method of forming the same
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Application No.: US16691869Application Date: 2019-11-22
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Publication No.: US11444030B2Publication Date: 2022-09-13
- Inventor: Hyunwoo Yang , Naganivetha Thiyagarajah , De Wei Shawn Wong , Suk Hee Jang
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Viering Jentschura & Partner mbB
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L27/22 ; H01L21/768 ; H01L23/522 ; H01L27/24

Abstract:
A semiconductor device may be provided, including a first dielectric layer having a first region and a second region laterally adjacent to the first region. The semiconductor device may further include a bottom electrode at least partially arranged within the first region of the first dielectric layer, a memory element arranged over the bottom electrode, a top electrode arranged over the memory element, and a second dielectric layer arranged over at least the first region of the first dielectric layer. The second dielectric layer may surround the memory element and may surround at least a part of the top electrode. The semiconductor device may further include a third dielectric layer arranged over the second region of the first dielectric layer and laterally adjacent to the second dielectric layer, and a conductive interconnect arranged in the third dielectric layer and the second region of the first dielectric layer.
Public/Granted literature
- US20210159184A1 SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME Public/Granted day:2021-05-27
Information query
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