Invention Grant
- Patent Title: High voltage vacuum feedthrough
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Application No.: US17140699Application Date: 2021-01-04
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Publication No.: US11443912B2Publication Date: 2022-09-13
- Inventor: Ronald Van Der Wilk
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: EP18210534 20181205
- Main IPC: H01J5/46
- IPC: H01J5/46 ; C03C27/04 ; H01J5/36 ; H01J9/28

Abstract:
A feedthrough for providing an electrical connection is provided. The feedthrough comprises a conductor and a quartz or a glass structure configured to surround at least a portion of the conductor and provide isolation to the conductor. The conductor and the quartz or glass structure may be coaxially arranged. The feedthrough can provide an electrical connection between an inside and outside of a vacuum chamber that contains a sample.
Public/Granted literature
- US20210175041A1 HIGH VOLTAGE VACUUM FEEDTHROUGH Public/Granted day:2021-06-10
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