Invention Grant
- Patent Title: Plasma generator and information processing method
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Application No.: US16963877Application Date: 2018-01-23
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Publication No.: US11412606B2Publication Date: 2022-08-09
- Inventor: Shinji Takikawa
- Applicant: FUJI CORPORATION
- Applicant Address: JP Chiryu
- Assignee: FUJI CORPORATION
- Current Assignee: FUJI CORPORATION
- Current Assignee Address: JP Chiryu
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- International Application: PCT/JP2018/001872 WO 20180123
- International Announcement: WO2019/145990 WO 20190801
- Main IPC: H05H1/46
- IPC: H05H1/46 ; H01J37/244 ; H01J37/32

Abstract:
It is an object of the present invention to provide a plasma generator capable of efficiently identifying the cause of an abnormal stoppage when an abnormal stoppage of the plasma generator occurs. When the controller determines that at least one detected value has become an abnormal value, the controller terminates plasma generation control. Further, in response to starting plasma generation control, the controller causes the storage section to store a history of detected values in association with time. As a result, it is possible to provide a history of detected values stored in the storage section to efficiently identify the cause of the abnormal stoppage.
Public/Granted literature
- US20210051791A1 PLASMA GENERATOR AND INFORMATION PROCESSING METHOD Public/Granted day:2021-02-18
Information query
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