Invention Grant
- Patent Title: Line narrowing module, gas laser apparatus, and electronic device manufacturing method
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Application No.: US17372106Application Date: 2021-07-09
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Publication No.: US11411364B2Publication Date: 2022-08-09
- Inventor: Miwa Igarashi , Shinichi Matsumoto
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/137
- IPC: H01S3/137 ; G03F7/20 ; H01S3/08 ; G02B26/08 ; H01S3/034 ; H01S3/225

Abstract:
A line narrowing module includes a prism including an entrance side surface that light enters, an exit side surface from which the light is emitted, and a bottom surface, and configured to wavelength-disperse the light having entered the entrance side surface and to emit the light from the exit side surface; a holder portion having a stationary surface on which the bottom surface of the prism is secured; a rotary mechanism portion including a rotary stage on which the holder portion is secured, the rotary stage being configured to rotate the prism around an axis perpendicular to a dispersion plane of the light emitted from the prism; a drive unit configured to rotate the rotary stage; and a grating configured to reflect the light emitted from the prism, centroids of the prism, the holder portion, and the rotary stage being located on the axis.
Public/Granted literature
- US20210336407A1 LINE NARROWING MODULE, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD Public/Granted day:2021-10-28
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