Invention Grant
- Patent Title: Integrated circuit (IC) structure with high impedance semiconductor material between substrate and transistor
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Application No.: US17151343Application Date: 2021-01-18
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Publication No.: US11411087B2Publication Date: 2022-08-09
- Inventor: John J. Ellis-Monaghan , Anupam Dutta , Satyasuresh V. Choppalli , Venkata N. R. Vanukuru , Michel Abou-Khalil
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Priority: IN202011052829 20201204
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/40

Abstract:
Embodiments of the disclosure provide an integrated circuit (IC) structure with a high impedance semiconductor material between a substrate and transistor. The IC structure may include: a substrate, a high impedance semiconductor material on a portion of the substrate, and a transistor on a top surface of the high impedance semiconductor material. The transistor includes a semiconductor channel region horizontally between a first source/drain (S/D) region and a second S/D region. The high impedance semiconductor material is vertically between the transistor and the substrate; a first insulator region is on the substrate and horizontally adjacent the first S/D region; and a first doped well is on the substrate and horizontally adjacent the first insulator region. The first insulator region is horizontally between the first doped well and the transistor.
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