Invention Grant
- Patent Title: Field plate and isolation structure for high voltage device
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Application No.: US16821247Application Date: 2020-03-17
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Publication No.: US11411086B2Publication Date: 2022-08-09
- Inventor: Kaochao Chen , Chia-Cheng Ho , Ming Chyi Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/40 ; H01L21/3105 ; H01L21/768 ; H01L29/06 ; H01L29/16 ; H01L29/78

Abstract:
An integrated chip includes a field plate overlying an isolation structure. A gate electrode overlies a substrate between a source region and a drain region. An etch stop layer laterally extends from an upper surface of the gate electrode to a front-side of the substrate. The etch stop layer overlies a drift region disposed between the source region and the drain region. The field plate is disposed within a first inter-level dielectric (ILD) layer overlying the substrate. The field plate extends from a top surface of the first ILD layer to an upper surface of the etch stop layer. The isolation structure is disposed within the substrate and extends from the front-side of the substrate to a point below the front-side of the substrate. The isolation structure is disposed laterally between the gate electrode and the drain region.
Public/Granted literature
- US20210296451A1 FIELD PLATE AND ISOLATION STRUCTURE FOR HIGH VOLTAGE DEVICE Public/Granted day:2021-09-23
Information query
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