Invention Grant
- Patent Title: Packaged semiconductor device including liquid-cooled lid and methods of forming the same
-
Application No.: US17114886Application Date: 2020-12-08
-
Publication No.: US11410910B2Publication Date: 2022-08-09
- Inventor: Sheng-Tsung Hsiao , Jen Yu Wang , Chung-Jung Wu , Tung-Liang Shao , Chih-Hang Tung
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L23/473
- IPC: H01L23/473 ; H01L21/48 ; H01L21/56 ; H01L21/78 ; H01L23/31 ; H01L23/498 ; H01L23/58 ; H01L23/00

Abstract:
Semiconductor devices including lids having liquid-cooled channels and methods of forming the same are disclosed. In an embodiment, a semiconductor device includes a first integrated circuit die; a lid coupled to the first integrated circuit die, the lid including a plurality of channels in a surface of the lid opposite the first integrated circuit die; a cooling cover coupled to the lid opposite the first integrated circuit die; and a heat transfer unit coupled to the cooling cover through a pipe fitting, the heat transfer unit being configured to supply a liquid coolant to the plurality of channels through the cooling cover.
Public/Granted literature
- US20220037231A1 Packaged Semiconductor Device Including Liquid-Cooled Lid and Methods of Forming the Same Public/Granted day:2022-02-03
Information query
IPC分类: