Invention Grant
- Patent Title: Observation method and observation apparatus
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Application No.: US17273860Application Date: 2019-09-05
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Publication No.: US11408727B2Publication Date: 2022-08-09
- Inventor: Shota Toyokura
- Applicant: KYOCERA Corporation
- Applicant Address: JP Kyoto
- Assignee: KYOCERA Corporation
- Current Assignee: KYOCERA Corporation
- Current Assignee Address: JP Kyoto
- Agency: Procopio Cory Hargreaves and Savitch LLP
- Priority: JPJP2018-175126 20180919
- International Application: PCT/JP2019/035000 WO 20190905
- International Announcement: WO2020/059523 WO 20200326
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B9/02091 ; G01B11/22

Abstract:
In an observation method, measurement values of an object of measurement at a plurality of different positions in a plane that intersects a depth direction are acquired from an optical coherence tomography instrument (S100). In the observation method, measurement values are integrated in the depth direction at each of the plurality of positions (S104). In the observation method, a shrinkage parameter of the object of measurement is calculated on the basis of the integrated values at each of the plurality of positions (S105).
Public/Granted literature
- US20210348913A1 OBSERVATION METHOD AND OBSERVATION APPARATUS Public/Granted day:2021-11-11
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