Invention Grant
- Patent Title: Multi-zone pedestal heater having a routing layer
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Application No.: US16196699Application Date: 2018-11-20
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Publication No.: US11382180B2Publication Date: 2022-07-05
- Inventor: Kevin Ptasienski , Stanton Hopkins Breitlow , Mohammad Nosrati , Kevin Smith , Brittany Phillips , Ken Ames , Patrick Margavio , Kurt English
- Applicant: Watlow Electric Manufacturing Company
- Applicant Address: US MO St. Louis
- Assignee: Watlow Electric Manufacturing Company
- Current Assignee: Watlow Electric Manufacturing Company
- Current Assignee Address: US MO St. Louis
- Agency: Burris Law, PLLC
- Main IPC: H05B3/06
- IPC: H05B3/06 ; H05B3/28 ; H05B1/02 ; H01L21/67 ; H01L23/522 ; H01L23/485 ; C23C16/458 ; H01L21/687

Abstract:
The present disclosure provides a support pedestal that includes a support member including a resistive layer having at least two zones, a routing layer, and a plurality of conductive vias. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of vias. The number of zones of the resistive layer is greater than or equal to a number of wires coupled to the routing layer. The routing layer may include a plurality of arm portions that extend from a central region of the routing layer. The support pedestal may further include a second resistive layer disposed along the same plane as the routing layer.
Public/Granted literature
- US20190159291A1 MULTI-ZONE PEDESTAL HEATER HAVING A ROUTING LAYER Public/Granted day:2019-05-23
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